Transistor array panel and manufacturing method thereof

ABSTRACT

A transistor array panel is manufactured by a method that reduces or obviates the need for highly selective etching agents or complex processes requiring multiple photomasks to create contact holes. The panel includes: a substrate; a buffer layer positioned on the substrate; a semiconductor layer positioned on the buffer layer; an intermediate insulating layer positioned on the semiconductor layer; and an upper conductive layer positioned on the intermediate insulating layer, wherein the semiconductor layer includes a first contact hole, the intermediate insulating layer includes a second contact hole positioned in an overlapping relationship with the first contact hole, and the upper conductive layer is in contact with a side surface of the semiconductor layer in the first contact hole.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. application Ser. No.15/380,596, filed on Dec. 15, 2016, and claims priority from and thebenefit of Korean Patent Application No. 10-2016-0053466, filed on Apr.29, 2016, each of which is hereby incorporated by reference for allpurposes as if fully set forth herein.

BACKGROUND Field

Exemplary embodiments employing the inventive concepts relate generallyto a transistor array panel and a manufacturing method thereof, and,more particularly, to a transistor array panel and manufacturing methodthat obviates the need for highly selective etching agents or complexprocesses requiring multiple photomasks to create contact holes thatprovide electrical connections in the transistor array panel.

Discussion of the Background

Transistors are used in various electronic devices such as a flat paneldisplay. The transistor includes a gate electrode and a semiconductorlayer overlapping the gate electrode via a gate insulating layer and achannel region. The semiconductor layer may further include a sourceregion and a drain region connected to the channel region, and thesource region and the drain region may face each other via the channelregion.

The semiconductor layer is a factor in determining the characteristicsof the transistor. For the semiconductor layer, an amorphous siliconsemiconductor, a polysilicon semiconductor, a metal oxide semiconductor,or the like are used.

A transistor array panel includes the transistor and various conductivelayers for driving the transistor. The gate electrode, the semiconductorlayer, and the various conductive layers configuring the transistor maybe positioned at various layers with the insulating layer there between,as can be depicted by a cross-sectional structure. The insulating layerincludes a contact hole for electrical connection between the gateelectrode, the semiconductor layer, and various layers of thetransistor. A process for etching the insulating layer is sometimesrequired to form the contact hole.

In a manufacturing process of the transistor array panel, conventionaletching processes have issues, e.g., during the process of formingcontact holes highly selective etching agents or multiple photomasks maybe required, which increase costs and further complicate themanufacturing process.

The above information disclosed in this Background section is only forenhancement of understanding of the background of the inventive conceptsand, therefore, it may contain information that does not form the priorart that is already known in this country to a person of ordinary skillin the art.

SUMMARY

Various exemplary embodiments employing the inventive concepts mayreduce or entirely solve the issues with conventional etching processes.For example, the invention reduces the manufacturing cost and themanufacturing time of the transistor array panel and simplifies themanufacturing process by forming contact holes connected to theelectrode or the conductive layer of various depths without thenecessity of a process using an etching material with a high selectivityor increasing of the number of photomasks. In other words, processesconducted according to the principles of the invention permit etching ofmultiple contact holes in different materials and to different depthswithout the need for these complex processing steps or materials, andenable etching of different materials simultaneously. Also, variousembodiments described herein may facilitate control of a remainingamount (thickness) of the semiconductor layer, increase the processmargin, and/or improve the characteristics of the transistor by reducingdamage to the semiconductor layer in the process of forming the contacthole. For example, conventional (low to medium selectivity) etchingagents may be used without increasing the number of masks and withoutconcern for tightly controlling the etching process to preventinadvertent etching of other layers.

Additional aspects of the inventive concepts will be set forth in thedetailed description which follows, and, in part, will be apparent fromthe disclosure, or may be learned by practice of the inventive concept.

According to a first aspect of the invention, a transistor array panelconstructed according to the inventive concepts includes a substrate, abuffer layer positioned on the substrate, a semiconductor layerpositioned on the buffer layer, an intermediate insulating layerpositioned on the semiconductor layer, and an upper conductive layerpositioned on the intermediate insulating layer, wherein thesemiconductor layer includes a first contact hole, the intermediateinsulating layer includes a second contact hole positioned in anoverlapping relationship with the first contact hole, and the upperconductive layer is in contact with a side surface of the semiconductorlayer in the first contact hole.

A cross sectional area of the second contact hole may be larger than across sectional area of the first contact hole.

The upper conductive layer may be in contact with an upper surface ofthe semiconductor layer at a shoulder at a bottom of the second contacthole.

The first contact hole may extend to or into an upper surface of thebuffer layer such that the first contact hole passes entirely throughthe semiconductor layer on the buffer layer.

The first contact hole may extend into the buffer layer such that across-sectional thickness of the buffer layer overlapping the firstcontact hole is smaller than a cross-sectional thickness of the bufferlayer that does not overlap the first contact hole.

The upper conductive layer may be in contact with the buffer layer inthe first contact hole.

The first contact hole may extend entirely through the semiconductorlayer and into, but not entirely through, the buffer layer.

The transistor array panel may further include a lower conductive layerpositioned between the substrate and the buffer layer, wherein thebuffer layer includes a third contact hole positioned over and exposingthe lower conductive layer, the intermediate insulating layer includes afourth contact hole positioned in an overlapping relationship with thethird contact hole, and the lower conductive layer includes a differentmaterial from a material of the semiconductor layer.

A cross sectional area of the fourth contact hole may be larger than across sectional area of the third contact hole.

The upper conductive layer may be in contact with an upper surface ofthe buffer layer in the fourth contact hole, and may be in contact withan upper surface of the lower conductive layer in the third contacthole.

The fourth contact hole may extend into the buffer layer.

Each of the first, second, third and fourth contact holes may have aside surface defining the width of its respective hole, with at leastone of the side surfaces having a substantially constant slope.

The lower conductor may be a data line.

A slope of a side surface of the first contact hole may be differentthan a slope of a side surface of the second contact hole.

The upper conductive layer may include a pixel electrode layer.

The substrate, the buffer layer, the semiconductor layer, theintermediate insulating layer and the upper conductive layer may be aportion of a display panel.

According to another aspect of the invention, an exemplary method ofmanufacturing a transistor array panel includes forming a buffer layeron a substrate, forming a semiconductor layer on the buffer layer,forming an intermediate insulating layer on the semiconductor layer,forming a first mask pattern on the intermediate insulating layer,forming a first etching hole in the intermediate insulating layer byusing the first mask pattern as an etching mask, removing a part of thefirst mask pattern to form a second mask pattern exposing an uppersurface of the intermediate insulating layer around the first etchinghole of the intermediate insulating layer, and removing the intermediateinsulating layer and the semiconductor layer by using the second maskpattern as an etching mask to form a first contact hole in thesemiconductor layer and a second contact hole in the intermediateinsulating layer.

The method of manufacturing a transistor array panel may furtherinclude, after forming the second contact hole, removing the second maskpattern, and forming an upper conductive layer on the intermediateinsulating layer, and the upper conductive layer may be in contact witha side surface of the semiconductor layer in the first contact hole.

Before forming the buffer layer, a lower conductive layer may be formedon the substrate, during the steps of forming the first contact hole andthe second contact hole, the intermediate insulating layer and thebuffer layer may be removed by using the second mask pattern as theetching mask to form a third contact hole of the buffer layer and afourth contact hole of the intermediate insulating layer, and the thirdcontact hole may expose an upper surface of the lower conductive layer.

The first and third holes may be simultaneously formed in the sameprocess step, and the second and fourth holes may be simultaneouslyformed in the same process step.

The step of forming the first contact hole may include removing at leastpart of the buffer layer corresponding to the first etching hole.

In various exemplary embodiments, only one mask is used in the processof forming the first contact hole and the second contact hole.

In various exemplary embodiments, only etching material having a low ormedium selectivity is used in the steps of forming the first etchinghole, the first contact hole and the second contact hole.

According to another exemplary embodiment of the invention, a method formanufacturing a transistor array panel includes forming a buffer layeron a substrate, forming a semiconductor layer on the buffer layer,forming an intermediate insulating layer on the semiconductor layer,forming a first mask pattern on the intermediate insulating layer, andetching the first mask pattern, the intermediate insulating layer, thebuffer layer, and the semiconductor layer that are not covered by thefirst mask pattern together to expose a side surface of the intermediateinsulating layer, the buffer layer, and the semiconductor layer.

In the etching step, an etching gas may be used such that an etch rateof the etching gas for the first mask pattern is higher than an etchrate for the intermediate insulating layer.

The method for manufacturing a transistor array panel may furtherinclude after forming the first mask pattern, forming a first hole inthe intermediate insulating layer by using the first mask pattern as anetching mask.

According to another exemplary embodiment employing the inventiveconcepts, a display panel includes a transistor array that has asubstrate, a semiconductor layer positioned on the substrate, anintermediate insulating layer positioned on the semiconductor layer, andan upper conductive layer positioned on the intermediate insulatinglayer. The semiconductor layer and intermediate insulating layer maydefine a first contact hole having a stepped, cross sectional shape. Theupper conductive layer may be in contact with a side surface of theintermediate insulating layer at an upper portion of the first contacthole. The upper conductive layer may be in contact with a side surfaceof the semiconductor layer at a lower portion of the first contact hole.

The upper portion of the first contact hole may have a first width, thelower portion of the first contact hole may have a second width smallerthan the first width and the first contact hole may have a shoulder atan intersection between the first and second widths.

The stepped shape of the first contact hole may be defined by a bottomsurface of an upper portion of the first contact hole, a bottom surfaceof a the lower portion of the first contact hole, and a side wallconnecting the bottom surfaces.

The display panel may further comprise a buffer layer. The upperconductive layer may be in contact with the buffer layer at a bottomportion of the first contact hole.

The semiconductor layer and intermediate insulating layer may furtherdefine a second contact hole having a stepped shape.

The buffer layer and the intermediate insulating layer may define athird contact hole having a stepped shape. And, the buffer layer and theintermediate insulating layer further define a fourth contact holehaving a stepped shape.

According to yet another exemplary embodiment employing the inventiveconcepts, a layered transistor structure includes a first layer, asecond layer positioned adjacent the first layer and having a peripheralportion and a central portion, a third layer positioned adjacent thesecond layer at the central portion, the third layer not extendingbeyond the central portion to the peripheral portion, a fourth layerpositioned adjacent the third layer at the central portion and directlyon the second layer at the peripheral portion, a peripheral contact holepassing entirely through the fourth layer and entirely through thesecond layer to an upper surface of the first layer at the peripheralportion, and a central contact hole passing entirely through the fourthlayer and at least partially into the third layer at the centralportion.

According to still another exemplary embodiment employing the inventiveconcepts, a transistor array panel includes a first insulating layerdefining a first portion of a contact hole extending entirely throughthe insulating layer, a semiconductor layer positioned adjacent thefirst insulating layer at a location of the contact hole and defining asecond portion of the contact hole extending entirely through thesemiconductor layer, and a second insulating layer positioned adjacentthe semiconductor layer at the location of the contact hole and defininga third portion of the contact hole that extends only partially into thesecond insulating layer. The contact hole may include a transition suchas 1) a shoulder connecting the first and second portions of the contacthole, 2) two different levels within the third portion of the contacthole, the two different levels within the third portion of the contacthole being connected by a shoulder within the third portion of thecontact hole, or 3) a junction between the first and second portions ofthe contact hole defining a transition between a first slope of asidewall of the first portion and a second slope of a sidewall of thesecond portion, the first slope and the second slope being different.

According to the foregoing inventive concepts and exemplary embodiments,it is not necessary to use difficult etching processes requiringincreased numbers of photomasks nor etching materials having highselectivity to form contact holes of various depths and in differentlayers, whereby the cost and the time to manufacture the transistorarray panel may be reduced and the manufacturing process may besimplified. Also, the inventive concepts facilitate easy control of theremaining thickness of the semiconductor layer, increasing the processmargin, and/or improving the characteristics of the transistor.

The foregoing general description and the following detailed descriptionare exemplary and explanatory and are intended to provide furtherexplanation of the claimed subject matter.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are included to provide a furtherunderstanding of the inventive concept, and are incorporated in andconstitute a part of this specification, illustrate exemplaryembodiments of the inventive concept, and, together with thedescription, serve to explain principles of the inventive concept.

FIG. 1 is a cross-sectional view of a transistor array panel constructedaccording to the principles of the invention,

FIG. 2 to FIG. 5 are schematic top plan views with each showing aportion of one of the contact holes in the exemplary transistor arraypanel shown in FIG. 1,

FIG. 6 to FIG. 16A and FIG. 17 are cross-sectional views sequentiallyshowing process steps in a method of manufacturing a transistor arraypanel according to an exemplary embodiment of the invention,

FIG. 16B is an enlarged portion of detail shown in FIG. 16A,

FIG. 18 is a partial layout view of a transistor array panel constructedaccording to another exemplary embodiment of the invention,

FIG. 19 is a cross-sectional view taken along a line A-AI of FIG. 18showing one example of a portion of the transistor array panel of FIG.18,

FIG. 20 is a schematic circuit diagram of one pixel of a transistorarray panel according to the exemplary embodiment shown in FIG. 18 andFIG. 19,

FIG. 21 is a partial layout view of a transistor array panel accordingto another exemplary embodiment of the invention,

FIG. 22 is a cross-sectional view taken along a line B-BI of FIG. 21showing one example of a portion of the transistor array panel of FIG.21,

FIG. 23 to FIG. 27 are cross-sectional views sequentially showingprocess steps of a method of manufacturing a transistor array panelaccording to another exemplary embodiment of the invention,

FIG. 28 and FIG. 29 are cross-sectional views sequentially showingprocess steps of a method of manufacturing a transistor array panelaccording to yet another exemplary embodiment of the invention,

FIG. 30, FIG. 31A and FIG. 32 are cross-sectional views sequentiallyshowing process steps of a method of manufacturing a transistor arraypanel according to another exemplary embodiment of the invention,

FIG. 31B and FIG. 31C are enlarged portions of detail shown in FIG. 31A,

FIG. 33A and FIG. 34 are cross-sectional views sequentially showingprocess steps of a method of manufacturing a transistor array panelaccording to another exemplary embodiment of the invention,

FIG. 33B is an enlarged portion of detail shown in FIG. 33A, and

FIG. 35 is a cross-sectional view of a transistor array panelconstructed according to yet another exemplary embodiment of theinvention.

DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENTS

In the following description, for the purposes of explanation, numerousspecific details are set forth in order to provide a thoroughunderstanding of various exemplary embodiments. It is apparent, however,that various exemplary embodiments may be practiced without thesespecific details or with one or more equivalent arrangements. In otherinstances, well-known structures and devices are shown in block diagramform in order to avoid unnecessarily obscuring various exemplaryembodiments.

In the accompanying figures, the size and relative sizes of layers,films, panels, regions, etc., may be exaggerated for clarity anddescriptive purposes. Also, like reference numerals denote likeelements.

When an element or layer is referred to as being “on,” “connected to,”or “coupled to” another element or layer, it may be directly on,connected to, or coupled to the other element or layer or interveningelements or layers may be present. When, however, an element or layer isreferred to as being “directly on,” “directly connected to,” or“directly coupled to” another element or layer, there are no interveningelements or layers present. For the purposes of this disclosure, “atleast one of X, Y, and Z” and “at least one selected from the groupconsisting of X, Y, and Z” may be construed as X only, Y only, Z only,or any combination of two or more of X, Y, and Z, such as, for instance,XYZ, XYY, YZ, and ZZ. Like numbers refer to like elements throughout. Asused herein, the term “and/or” includes any and all combinations of oneor more of the associated listed items.

Although the terms first, second, etc. may be used herein to describevarious elements, components, regions, layers, and/or sections, theseelements, components, regions, layers, and/or sections should not belimited by these terms. These terms are used to distinguish one element,component, region, layer, and/or section from another element,component, region, layer, and/or section. Thus, a first element,component, region, layer, and/or section discussed below could be termeda second element, component, region, layer, and/or section withoutdeparting from the teachings of the present disclosure.

Spatially relative terms, such as “beneath,” “below,” “lower,” “above,”“upper,” and the like, may be used herein for descriptive purposes, and,thereby, to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the drawings. Spatiallyrelative terms are intended to encompass different orientations of anapparatus in use, operation, and/or manufacture in addition to theorientation depicted in the drawings. For example, if the apparatus inthe drawings is turned over, elements described as “below” or “beneath”other elements or features would then be oriented “above” the otherelements or features. Thus, the exemplary term “below” can encompassboth an orientation of above and below. Furthermore, the apparatus maybe otherwise oriented (e.g., rotated 90 degrees or at otherorientations), and, as such, the spatially relative descriptors usedherein interpreted accordingly.

The terminology used herein is for the purpose of describing particularembodiments and is not intended to be limiting. As used herein, thesingular forms, “a,” “an,” and “the” are intended to include the pluralforms as well, unless the context clearly indicates otherwise. Moreover,the terms “comprises,” “comprising,” “includes,” and/or “including,”when used in this specification, specify the presence of statedfeatures, integers, steps, operations, elements, components, and/orgroups thereof, but do not preclude the presence or addition of one ormore other features, integers, steps, operations, elements, components,and/or groups thereof.

Various exemplary embodiments are described herein with reference tosectional illustrations that are schematic illustrations of idealizedexemplary embodiments and/or intermediate structures. As such,variations from the shapes of the illustrations as a result, forexample, of manufacturing techniques and/or tolerances, are to beexpected. Thus, exemplary embodiments disclosed herein should not beconstrued as limited to the particular illustrated shapes of regions,but are to include deviations in shapes that result from, for instance,manufacturing. For example, an implanted region illustrated as arectangle will, typically, have rounded or curved features and/or agradient of implant concentration at its edges rather than a binarychange from implanted to non-implanted region. Likewise, a buried regionformed by implantation may result in some implantation in the regionbetween the buried region and the surface through which the implantationtakes place. Thus, the regions illustrated in the drawings are schematicin nature and their shapes are not intended to illustrate the actualshape of a region of a device and are not intended to be limiting.

Unless otherwise defined, all terms (including technical and scientificterms) used herein have the same meaning as commonly understood by oneof ordinary skill in the art to which this disclosure is a part. Terms,such as those defined in commonly used dictionaries, should beinterpreted as having a meaning that is consistent with their meaning inthe context of the relevant art and will not be interpreted in anidealized or overly formal sense, unless expressly so defined herein.

Referring to FIG. 1, the transistor array panel according to a firstexemplary embodiment constructed according to the principles of theinvention includes a substrate 110 and a plurality of transistors TRpositioned on one surface of the substrate 110. FIG. 1 only shows onetransistor TR for convenience.

A first direction D1 and a second direction D2 shown in FIG. 1 areparallel to a surface shown when viewing in a direction perpendicular toa surface of the substrate 110 and are perpendicular to each other, anda third direction D3 is perpendicular to the first and second directionsD1 and D2 and is substantially perpendicular to the surface of thesubstrate 110. The third direction D3 may be mainly represented in thecross-sectional structure and is referred to as a cross-sectionaldirection. A structure shown when observing in the third direction D3 isreferred to as a plan structure. A view in the third directions D3 isreferred to as a plan view. An area of an object or feature in a planview is referred to herein as a plan area. The magnitude of a plan areais referred to herein as a plan size. Similarly, a shape of an object orfeature in a plan view is referred to herein as the plan shape of thatobject or feature. Thus, whereas FIG. 1 is a cross-sectional view indirection D2, when viewed from above, a top view of the same structure,which is a view in direction D3, is a plan view of the structure. In thecross-sectional structure, if a constituent element is positioned on anyother constituent element, it means that two constituent elements arearranged in the third direction D3, and other constituent elements maybe positioned between the two constituent elements.

The substrate 110 includes an insulating material such as plastic,glass, etc., and may have flexibility. A partial region of the substrate110 may be removed if necessary.

The transistor TR includes a semiconductor layer 152, an upper electrode124, and an insulating layer 144 positioned between the semiconductorlayer 152 and the upper electrode 124.

The semiconductor layer 152 includes a channel region 154 formed of achannel of the transistor TR, and a source region 153 and a drain region155 respectively positioned at opposing sides of the channel region 154.The source region 153 and the drain region 155 are positioned in thesame layer as the channel region 154 and are connected to the channelregion 154.

The source region 153, the drain region 155, and the channel region 154may include the same material, for example, a metal oxide, apolysilicon, or amorphous silicon. When the source region 153, the drainregion 155, and the channel region 154, include the metal oxide, it maybe, for example, zinc oxide (ZnO), zinc-tin oxide (ZTO), zinc-indiumoxide (ZIO), indium oxide (InO), titanium oxide (TiO),indium-gallium-zinc oxide (IGZO), or indium-zinc-tin oxide (IZTO).

A carrier concentration of the source region 153 and the drain region155 is larger than a carrier concentration of the channel region 154,and the source region 153 and the drain region 155 may be conductive. Agradient region where the carrier concentration is gradually changed maybe formed between the source region 153 and the drain region 155, andthe channel region 154.

The source region 153 and the drain region 155 may be formed by makingpart of the semiconductor material conductive by a method such as plasmatreatment after depositing the semiconductor material on the substrate110. For example, after depositing the metal oxide semiconductormaterial on the substrate 110, the metal oxide semiconductor materialmay be doped with a gas including at least one among fluorine (F),hydrogen (H), and sulfur (S) in a chamber to form the source region 153and the drain region 155. In this case, the part that is not doped withthe impurity remains as the channel region 154.

In various embodiments, a thickness of the semiconductor layer 152 inthe third direction D3 is about 400 Å. In other embodiments, thethickness of the semiconductor layer 152 may be different depending uponthe particular application and process.

The upper electrode 124 overlaps the channel region 154 with theinsulating layer 144 interposed there-between. The upper electrode 124may include a conductive material such as a metal. The upper electrode124 may function as a gate electrode of the transistor TR.

The insulating layer 144 may include an inorganic insulating materialsuch as a silicon oxide (SiOx), a silicon nitride (SiNx), or a siliconoxynitride (SiON), or an organic insulating material, and may be asingle layer or a multilayer including at least one among thesematerials.

Most of the insulating layer 144 may only be positioned between thesemiconductor layer 152 and the upper electrode 124. In this case, theedge of the upper surface or the lower surface of the gate insulatinglayer 144 may be substantially parallel to the edge of the lower surfaceand the upper surface of the upper electrode 124. To be substantiallyparallel to each other at two edges means that two edges accord or arealigned with each other or are parallel to each other within apredetermined distance even if they are not precisely matched, and it isthe same in the following description. That is, in a plan structure ofthe transistor array panel, the plan shape of the insulating layer 144may be substantially the same as the plan shape of the upper electrode124. The insulating layer 144 may cover most of the channel region 154of the semiconductor layer 152. This is because the upper electrode 124and the insulating layer 144 are formed by using one photomask in themanufacturing process of the transistor array panel.

Differently from FIG. 1, in various embodiments the insulating layer 144is not limited to the region between the upper electrode 124 and thesemiconductor layer 152, and may be continuously formed on the substrate110. In such embodiments, the insulating layer 144 may also bepositioned on the source region 153 and the drain region 155 of thetransistor TR.

The planar shape of the channel region 154 of the semiconductor layer152 may be substantially the same as the planar shape of the upperelectrode 124. In other words, the edge of the channel region 154 may besubstantially parallel and may be approximately aligned to the edge ofthe upper electrode 124. The boundary between the channel region 154 andthe source region 153 and the boundary between the channel region 154and the drain region 155 may be substantially parallel or may be alignedto the edge of the upper electrode 124.

In various embodiments, a buffer layer 111 is positioned between thesubstrate 110 and the transistor TR. The buffer layer 111 functions asan insulating layer and may have a single layer or multilayer structureincluding at least one of the inorganic insulating materials such as asilicon oxide (SiOx), a silicon nitride (SiNx), or an organic insulatingmaterial. The buffer layer 111 may prevent an impurity from flowing intothe semiconductor layer 152 from the substrate 110, thereby protectingthe semiconductor layer 152 and preventing characteristic degradation ofthe semiconductor layer 152.

The buffer layer 111, as shown in FIG. 1, may be substantially andcontinuously formed on the substrate 110, or alternatively, may only beformed in a partial region of the substrate 110. For example, the bufferlayer 111 may be patterned to only be positioned between thesemiconductor layer 152 and the substrate 110.

The thickness of the buffer layer 111 in the third direction D3 may besimilar to the thickness of the intermediate insulating layer 160 in thethird direction D3, however it is not limited thereto, and it may bethicker or thinner than the thickness of the intermediate insulatinglayer 160 in the third direction D3.

In various embodiments, a lower conductive layer including a lowerelectrode 70 and a lower conductor 172 is positioned between at leastsome transistors TR among the plurality of transistors TR included inthe transistor array panel and the substrate 110. In some embodiments,the lower electrode 70 and the lower conductor 172 are positioned withthe same layer in the cross-sectional structure, and are positionedbetween the buffer layer 111 and the substrate 110. The lower electrode70 and the lower conductor 172 may include the same material.

The lower electrode 70 overlaps the semiconductor layer 152 in the thirddirection D3 such that the semiconductor layer 152 may be covered by thelower electrode 70 when viewed in a lower surface direction of thesubstrate 110, i.e., when viewed in a direction from the bottom of thepage in FIG. 1.

The lower electrode 70 may have various functions, and one among themmay be a light blocking function for the semiconductor layer 152. Thelower electrode 70 prevents external light from reaching thesemiconductor layer 152, thereby preventing a characteristicdeterioration of the semiconductor layer 152 caused by exposure tolight, and thereby suppressing a leakage current of the transistor TR.As another function of the lower electrode 70, in embodiments where thelower electrode 70 is electrically connected to one electrode of thetransistor TR to be applied with the voltage, a uniform output currentcharacteristic may be obtained in a saturation region of the transistorTR.

The lower conductor 172 may transmit a signal such as a data voltage, adriving voltage, and the like. For example, when the lower conductor 172transmits the data voltage, the lower conductor 172 may be a part of thedata line or may be connected to the data line.

The lower conductive layer (including the lower electrode 70 and thelower conductor 172) may include a different material from thesemiconductor layer 152, and for example, may include a metal such ascopper (Cu) or other conductive materials.

In various embodiments, an intermediate insulating layer 160 may bepositioned on the transistor TR. The intermediate insulating layer 160may be a single layer or multilayer. The intermediate insulating layer160 may include an inorganic insulating material such as a silicon oxide(SiOx), a silicon nitride (SiNx), or an organic insulating material.

Referring to FIG. 1 to FIG. 5, the intermediate insulating layer 160includes a contact hole 162 positioned on or over the lower conductor172 and overlapping the lower conductor 172, a contact hole 166positioned on or over the lower electrode 70 and overlapping the lowerelectrode 70, a contact hole 163 positioned on or over the source region153 of the semiconductor layer 152 and overlapping the source region153, and a contact hole 165 positioned on or over the drain region 155of the semiconductor layer 152 and overlapping the drain region 155. Inthe contact holes 162, 163, 165, and 166, the intermediate insulatinglayer 160 is removed.

Referring to FIG. 1, FIG. 2, and FIG. 4, in the depicted embodiment(s)the buffer layer 111 includes a contact hole 112 corresponding to thecontact hole 162 of the intermediate insulating layer 160 and a contacthole 116 corresponding to the contact hole 166 of the intermediateinsulating layer 160.

The contact hole 112 is positioned under the contact hole 162 of theintermediate insulating layer 160 in the cross-sectional structure, ispositioned in the contact hole 162 of the intermediate insulating layer160 in the plan structure, and has a smaller size than the contact hole162.

The contact hole 116 is positioned under the contact hole 166 of theintermediate insulating layer 160 in the cross-sectional structure, ispositioned in the contact hole 166 of the intermediate insulating layer160 in the plan structure, and has a smaller size of the contact hole166.

In the contact holes 112 and 116, the buffer layer 111 is removed. Thatis, in the depicted embodiment, contact holes 112 and 116 pass entirelythrough the buffer layer 111 to expose lower conductor 172.

In an alternative embodiment, the contact holes 162 and 166 of theintermediate insulating layer 160 may extend below a top surface of thebuffer layer 111. That is, in this embodiment only part of the bufferlayer 111 positioned between the edge of the contact hole 112 and 116 ofthe buffer layer 111 and the edge of the contact hole 162 and 166 of theintermediate insulating layer 160 may be removed.

As depicted in, for example, FIG. 1, the cross section (size of the holein a plan view, or “plan size”) of the contact holes 112 and 116 of thebuffer layer 111 is smaller than the cross section (plan size) of thecontact holes 162 and 166 of the intermediate insulating layer 160,respectively, corresponding to the contact holes 112 and 116. In theembodiment of FIG. 1, the intersection between holes 112 and 162, andholes 116 and 166, is in the form of a shoulder S disposed at theintersection between the side walls defining a larger width (e.g.,diameter) of the upper holes 162, 166 and the side walls defining asmaller width (e.g., diameter) of the lower holes 112, 116. The sidewall of the upper hole, the shoulder and the side walls of the lowerhole together define a stepped shape, as shown best in the enlarged viewof FIGS. [proposed new figures] In alternative embodiments, the plansize of the contact holes 112 and 116 of the buffer layer 111 may besimilar to a plan size of the contact holes 162 and 166 of theintermediate insulating layer 160 respectively. That is, some exemplaryembodiments may have no shoulder between the respective holes. Thus, invarious exemplary embodiments, any given contact hole might not have astepped shape. Accordingly, in these exemplary embodiments the sidesurfaces of the contact holes 112, 116 and the contact hole 162, 166form contiguous, generally flat surfaces having a constant slope.Further, in various exemplary embodiments lacking a shoulder, there is ajunction where a first substantially constant slope of the side surfacesof contact hole 162, 166 changes to a second substantially constantslope of side surfaces of contact hole 112, 116, the secondsubstantially constant slope having a value different than a value ofthe first constant slope. Still further, in other various exemplaryembodiments lacking a shoulder, the slope of side surfaces of contacthole 112, 116 is the same as the slope of side surfaces of contact hole162, 166, such that the respective side surfaces form a singlesubstantially straight line in a cross-sectional view thereof. These andother embodiments of the contact holes are described in detail laterrelated to the drawings.

Referring to FIG. 1, FIG. 3, and FIG. 5, the semiconductor layer 152includes a contact hole 113 corresponding to the contact hole 163 of theintermediate insulating layer 160 and a contact hole 115 correspondingto the contact hole 165 of the intermediate insulating layer 160. Thus,in various embodiments, at least part of the semiconductor layer 152 isremoved in the contact holes 113 and 115. As shown in FIG. 1, in thecontact holes 113 and 115, the semiconductor layer 152 may all beremoved. In other words, in the embodiment depicted in FIG. 1, thecontact holes 113 and 115 pass entirely through the semiconductor layer152. In other embodiments, a part of the lower side of the semiconductorlayer 152 may remain such that contact holes 113 and 115 do not passentirely through the semiconductor layer 152.

The contact hole 113 is positioned under the contact hole 163 of theintermediate insulating layer 160 in the cross-sectional view of thestructure of the embodiment depicted in FIG. 1, e.g., is positioned inthe contact hole 163 of the intermediate insulating layer 160 in theplan view of the structure of the embodiment depicted in FIG. 2, e.g.,and has a smaller size, i.e. diameter than the contact hole 163.Accordingly, the upper surface of the source region 153 around thecontact hole 113 is not covered by the intermediate insulating layer160.

In the depicted embodiment(s), the contact hole 115 is positioned underthe contact hole 165 of the intermediate insulating layer 160 in thecross-sectional view of the structure, is positioned in the contact hole165 of the intermediate insulating layer 160 in the plan view of thestructure, and has a smaller size, i.e. diameter, than the contact hole165 as depicted in FIG. 5. Accordingly, the upper surface of the drainregion 155 around the contact hole 115 is not covered by theintermediate insulating layer 160.

In an exemplary embodiment of the contact holes 163 and 165, a width W1of one side of the upper surface of the semiconductor layer 152positioned around the contact holes 113 and 115 among the semiconductorlayer 152 that is not covered by the intermediate insulating layer 160may be about 0.5 μm or more. However width W1 is not limited to thatvalue. Rather, width W1 may be appropriately controlled depending on thecharacteristics of the transistor TR.

The contact holes 113 and 115, in the embodiment shown in FIG. 1, extendto the inside of the buffer layer 111 such that at least part of theupper portion of the buffer layer 111 may be removed. In this case, in aview of the cross-sectional structure, a smallest cross-sectionalthickness of the buffer layer 111 positioned under the contact holes 113and 115 may be smaller than the smallest cross-sectional thickness ofthe buffer layer 111 that does not overlap the contact holes 113 and115, for example the buffer layer 111 overlapping the channel region154.

In the embodiment depicted in FIG. 1, e.g., the buffer layer 111positioned under the contact holes 113 and 115 is not all removed suchthat the contact holes 113 and 115 do not reach all the way through thebuffer layer 111 to the lower electrode 70.

In various embodiments that are different from FIG. 1, the contact holes113 and 115 may only extend to the upper surface of the buffer layer111, but may not extend to the inside of the buffer layer 111.

In various embodiments of the contact holes 113 and 115, an inner angleA between the side surface of the semiconductor layer 152 and thesurface of the substrate 110 may be about 30° or more.

According to the exemplary embodiments, the contact holes 112, 113, 115,116, 162, 163, 165, and 166 formed in the buffer layer 111, theintermediate insulating layer 160, and the semiconductor layer 152 areformed throughout the different layers from each other in the view ofthe cross-sectional structure, and two overlapping contact holes of thecontact holes 112, 113, 115, 116, 162, 163, 165, and 166 entirelytogether form the side surface(s) of the step shape.

In the embodiment depicted in FIG. 1, each side wall (surface) of thecontact holes 112, 113, 115, 116, 162, 163, 165, and 166 is obliquelyinclined in the surface direction of the substrate 110 to define atapered shape. For clarity, the side walls are those surfaces to whichthe distal end of the lead lines for reference numerals 112, 113, 115,116, 162, 163, 165, 166 in FIG. 1 touch, as well as the symmetricallyopposing surfaces. Further, and with reference to FIG. 2 through FIG. 5,it should be understood that, in various exemplary embodiments,including embodiments where the contact holes have a generally circularplan shape, the left and right opposing symmetrical surfaces of anygiven contact hole that appear to be discontinuous in thecross-sectional view of FIG. 1 are actually single contiguous surfaces.Also, in alternative embodiments, each side surface of the contact holes112, 113, 115, 116, 162, 163, 165, and 166 may be substantiallyperpendicular to the surface direction of the substrate 110 (and, invarious exemplary embodiments, thus also perpendicular to the surfacedirection of other layers as well). This concept of alternativegeometries applies in following drawings. A tapered geometry may beperpendicular in alternative embodiments and a perpendicular geometrymay be tapered in alternative embodiments.

In various embodiments, an upper conductive layer including a firstconnection part 173 and a second connection part 175 is formed on theintermediate insulating layer 160.

The first connection part 173 may be in contact with the upper surfaceof the lower conductor 172 through the contact holes 112 and 162 to beelectrically connected therewith, and may likewise be in contact withthe source region 153 through the contact holes 113 and 163 to beelectrically connected therewith. The first connection part 173 may bein contact with the upper surface of the source region 153 in thecontact hole 163 and may be in contact with the side surface of thesource region 153 in the contact hole 113. The first connection part 173may electrically connect the lower conductor 172 and the source region153, and the source region 153 may be in contact with a voltagetransmitted by the lower conductor 172 through the first connection part173.

The second connection part 175 may be in contact with the upper surfaceof the lower electrode 70 through the contact holes 116 and 166 to beelectrically connected therewith, and may likewise be in contact withthe drain region 155 through the contact holes 115 and 165 to beelectrically connected therewith. The second connection part 175 may bein contact with the upper surface of the drain region 155 in the contacthole 165 and may be in contact with the side surface of the drain region155 in the contact hole 115. The second connection part 175 mayelectrically connect the lower electrode 70 and the drain region 155 toeach other, and the lower electrode 70 may be electrically connected tothe drain region 155 to be applied with the voltage. Accordingly, in avoltage-current characteristic graph of an embodiment of the transistorTR, a current slope decreases in the saturation region such that a rangeof the region where the output current of the transistor TR is uniformmay be widened. Accordingly, even if a change is generated in thevoltage input to the source region 153 of the transistor TR, the outputcurrent of the transistor TR may be uniform such that the outputsaturation characteristic may be improved in various embodiments.

The first connection part 173 and the second connection part 175 mayrespectively be in contact with the buffer layer 111 in the contactholes 113 and 115.

Depending on the structure of the transistor array panel, in variousembodiments one or more of the contact holes 112 and 162, the contactholes 116 and 166, the contact holes 113 and 163, and the contact holes115 and 165 may be omitted.

In some embodiments that are different than the embodiment depicted inFIG. 1, the lower electrode 70 may be omitted. In some such embodiments,the contact holes 166 and 116 may be omitted and the second connectionpart 175 isn't connected to the lower electrode 70.

Next, a manufacturing method of the transistor array panel according toan exemplary embodiment will be described with reference to FIG. 6 toFIG. 17 along with FIG. 1 to FIG. 5.

First, referring to FIG. 6, in various embodiments, a conductivematerial is deposited on a substrate 110 including an insulatingmaterial such as glass or plastic and patterned by a method such asphotolithography to form a lower conductive layer including a lowerelectrode 70 and a lower conductor 172. Next, an insulating material maybe deposited on the substrate 110 and the lower conductive layer to forma buffer layer 111 as depicted.

Next, referring to FIG. 7, in various embodiments a semiconductormaterial such as a metal oxide semiconductor is deposited on the bufferlayer 111 and is patterned to form a semiconductor layer 152.

Next, referring to FIG. 8, an insulating material may be deposited onthe substrate 110 formed with the semiconductor layer 152 to form aninitial insulating layer 140 as depicted. Next, the conductive materialsuch as the metal may be deposited on the initial insulating layer 140to form a conductive layer 120 as depicted.

Next, in various embodiments, a mask pattern 50 is formed on theconductive layer 120. The mask pattern 50 may be formed through anexposure process using a photomask after coating a photosensitive filmsuch as a photoresist. The mask pattern 50 includes a portionoverlapping the semiconductor layer 152.

Next, referring to FIG. 8 and FIG. 9, the conductive layer 120 may beetched by using the mask pattern 50 as a mask to form an upper electrode124 as depicted. Next, the initial insulating layer 140 may be etched byusing the mask pattern 50 and the upper electrode 124 as a mask to forman insulating layer 144. Although not shown, part of the buffer layer111 may also be etched in the etching process of the initial insulatinglayer 140 in various embodiments.

Next, referring to FIG. 10, in various embodiments the semiconductorlayer 152 that is not covered by the insulating layer 144 and is exposedis processed to form a source region 153 and a drain region 155. In somesuch embodiments, the processing method may use a heat treatment methodin a reduction atmosphere, or a plasma process method using a gas plasmasuch as hydrogen (H2), helium (He), phosphine (PH3), ammonia (NH3),silane (SiH4), methane (CH4), acetylene (C2H2), diborane (B2H6), carbondioxide (CO2), germane (GeH4), hydrogen selenide (H2Se), hydrogensulfide (H2S), argon (Ar), nitrogen (N2), nitrous oxide (N2O), orfluoroform (CHF3). The semiconductor layer 152 covered by the gateinsulating layer 144 mainly maintains the semiconductor property,thereby being the channel region 154.

Next, referring to FIG. 11, in various embodiments, the insulatingmaterial is deposited on the substrate 110 to form an intermediateinsulating layer 160.

Next, referring to FIG. 12, the photosensitive film such as thephotoresist may be coated on the intermediate insulating layer 160 andpatterned through the exposure process using the photomask to form amask pattern 52 as depicted. The mask pattern 52 may include openingsrespectively positioned on the lower conductor 172, the lower electrode70, the source region 153, and the drain region 155.

Next, referring to FIG. 13, in various embodiments the intermediateinsulating layer 160 is etched by using the mask pattern 52 as a mask toform a hole 162 a positioned on the lower conductor 172, a hole 166 apositioned on the lower electrode 70, a hole 163 a positioned on thesource region 153, and a hole 165 a positioned on the drain region 155.Accordingly, the buffer layer 111, the source region 153, and the drainregion 155 are exposed. In some such embodiments, a dry etching methodmay be used.

Next, referring to FIG. 14, the mask pattern 52 may be partially removedby a method such as ashing to form a reduced mask pattern (a reducedphotosensitive pattern) 52 a as depicted in FIG. 15. The ashing may usean oxygen-based gas. Thus, the cross-sectional thickness of the maskpattern 52 is reduced and the plan area of the openings of the maskpattern 52 is widened or expanded. Accordingly, a portion of the uppersurface of the intermediate insulating layer 160 that is positionedaround the holes 162 a, 163 a, 165 a, and 166 a of the intermediateinsulating layer 160 is exposed. This exposed portion of the uppersurface of the interlayer insulating later 160 that is exposed by ashingthe mask pattern 52 is indicated, respectively, at 162 e, 163 e, 165 eand 166 e.

Next, referring to FIG. 15, in various embodiments, the part that is notcovered by the reduced mask pattern 52 a, that is, the part that isexposed, is etched by using the reduced mask pattern 52 a as an etchingmask. In some such embodiments, the etching degree may be appropriatelycontrolled, and while the lower conductor 172 and the lower electrode 70are not covered by the mask pattern 52 a, the etching may be performedfor the semiconductor layer 152 that is not covered by the reduced maskpattern 52 a such that the etching process does not pass entirelythrough the semiconductor layer 152 and the lower electrode 70positioned under the semiconductor layer 152 is not exposed.

Accordingly, in various embodiments, the buffer layer 111 positionedunder the holes 162 a and 166 a of the intermediate insulating layer 160is etched to form contact holes 112 and 116 exposing the lower conductor172 and the lower electrode 70 in the buffer layer 111, and at leastpart of the semiconductor layer 152 positioned under the holes 163 a and165 a of the intermediate insulating layer 160 is etched to form contactholes 113 and 115 in the semiconductor layer 152. The semiconductorlayer 152 may all be removed, that is, etched entirely through; but,alternatively, at least part of the semiconductor layer 152 may alsoremain in the contact holes 113 and 115. Whether the semiconductor layeris etched entirely through depends on an etch rate or selectivity of anetching gas used in this exemplary portion of the etching process forthe buffer layer 111 and the semiconductor layer 152.

The intermediate insulating layer 160 that is not covered by the reducedmask pattern 52 a and is exposed may also be etched along with thebuffer layer 111 and the semiconductor layer 152. Accordingly, contactholes 162 and 166 exposing the buffer layer 111 around the contact holes112 and 116 of the buffer layer 111 and contact holes 163 and 165exposing the semiconductor layer 152 around the contact holes 113 and115 of the semiconductor layer 152 may be formed in the intermediateinsulating layer 160 as depicted. In the contact holes 163 and 165,among the semiconductor layer 152 that is not covered by theintermediate insulating layer 160, one side width W1 (see FIG. 1) of theupper surface of the semiconductor layer 152 positioned around thecontact holes 113 and 115 may, in various exemplary embodiments, beabout 0.5 μm or more. However, in other embodiments the value of W1 isdifferent. The width W1 of the upper surface of the semiconductor layer152 may be controlled by controlling an amount of the mask pattern 52removed in the process of forming the reduced mask pattern 52 a throughthe removal of the mask pattern 52 by the ashing and the like.

Accordingly, the contact holes 112 and 162 exposing the lower conductor172, the contact holes 116 and 166 exposing the lower electrode 70, thecontact holes 113 and 163 exposing the upper surface and the sidesurface of the source region 153, and the contact holes 115 and 165exposing the upper surface and the side surface of the drain region 155are formed in various exemplary embodiments. As the terms are usedherein, references to the upper surface of the source region 153 and thedrain region 155 mean a surface approximately parallel to a surfacedirection of the substrate 110, and references to the side surface meana surface parallel to a direction different from the surface directionof the substrate 110.

The contact holes 113 and 115 of the semiconductor layer 152, as shownin FIG. 15, may, in some embodiments, extend into at least part of theupper portion of the buffer layer 111 or may, in other embodiments, notextend to the buffer layer 111.

Alternatively, at least part of the buffer layer 111 positioned aroundthe contact holes 112 and 116 of the buffer layer 111 and exposed by thecontact holes 162 and 166 of the intermediate insulating layer 160 maybe removed. Accordingly, the contact holes 162 and 166 of theintermediate insulating layer 160 may be formed to extend to the insideof the buffer layer 111. Furthermore, the contact holes 162 and 166 ofthe intermediate insulating layer 160 may be connected while forming theflat side surface with the contact holes 112 and 116 of the buffer layer111 without forming the step shape. Thus, in some embodiments, by thecontact holes 163 and 165 of the intermediate insulating layer 160, theupper surface of the semiconductor layer 152 may be exposed in, forexample, a step shape, or in some other embodiments, only the sidesurface of the semiconductor layer 152, but not a top surface thereof,is exposed. In the contact holes 162, 163, 165, and 166 of theintermediate insulating layer 160, the etching degree of the bufferlayer 111 and the semiconductor layer 152 may be different depending onthe etch rate or the selectivity of the etching gas used for the bufferlayer 111 and the semiconductor layer 152.

In various exemplary embodiments, such as embodiments having the contacthole exposing the lower conductive layer including the lower electrode70 and the lower conductor 172 and embodiments having the contact holeexposing the semiconductor layer 152, the contact holes being connectedto the constituent elements positioned at the various layers and havingthe various depths may be formed by using one mask pattern 52 formedthrough one photomask. Accordingly, the manufacturing cost and themanufacturing time of the transistor array panel may be reduced and themanufacturing process may be simplified, particularly with respect toprocesses that use plural photomasks.

Also, it is not necessary to use the etching gas with the highselectivity for the buffer layer 111 and the semiconductor layer 152such that the difficulty of the process may be reduced, particularly ascompared to processes where the etching gas must be selected to have aparticular high selectivity according the materials used to formulatethe various elements of the transistor/panel.

Also, forming contact holes according the principles of the inventionfacilitates easy control of the semiconductor layer 152 remaining incontact with the other layers, thereby increasing the process margin,and improving the characteristics of the transistor TR. Particularly,the initial thickness of the semiconductor layer 152 may besubstantially maintained and the margin for reducing the cross-sectionalthickness of the semiconductor layer 152 increased.

Next, referring to FIG. 16A and FIG. 1, in various exemplaryembodiments, the reduced mask pattern 52 a is removed and the conductivelayer is deposited on the intermediate insulating layer 160 and ispatterned to form an upper conductive layer including a first connectionpart 173 and a second connection part 175 (see also FIG. 17).

FIG. 16B shows enlarged detail of an exemplary contact hole from FIG.16A, including a first side surface 1610 defining a first width, e.g.,diameter of a first portion of the hole, a second side surface 1630defining a second width, e.g, diameter, of a second portion of the holeand a bottom 1640. The second width preferably is smaller than the firstwidth in this embodiment. A shoulder S is formed by a generallyhorizontally planar surface 1620 connecting the first side surface 1610and the second side surface 1630. In other embodiments, such as shown inFIGS. 31B, 31C, and 33B the first and second widths are substantiallyequal in which case the shoulder S is eliminated, or, in the case of theembodiment of FIG. 31B, moved to a lower location. In the embodiment ofFIG. 33B, the slopes of the first and second side walls are differentand meet at a junction (discontinuity) between the two widths, whichdoes not form a shoulder. If the slopes are substantially the same, thenthe there will be no shoulder or junction between the sidewalls, whichwill form a substantially contiguous surface, such as shown in the uppertwo layers of the embodiment of FIG. 31B and as shown in the embodimentof FIG. 31C.

Next, referring to FIG. 17, the inorganic insulating material or theorganic insulating material may be deposited on the upper conductivelayer and may be patterned to form a passivation layer 180 including acontact hole 185 as depicted. The contact hole 185, for example, may bepositioned on the second connection part 175 and exposes the secondconnection part 175. The upper surface of the passivation layer 180 maybe substantially flat as depicted.

Next, the detailed structure of the transistor array panel according toan exemplary embodiment will be described with reference to FIG. 18 toFIG. 20 along with above-described FIG. 1 to FIG. 5.

FIG. 18 is a partial layout view of a transistor array panel accordingto another exemplary embodiment of the invention, and FIG. 19 is across-sectional view taken along a line A-AI of FIG. 18 showing oneexample of a portion of the transistor array panel of FIG. 18.

Referring to FIG. 18 and FIG. 19, various exemplary embodiments of thetransistor array panel are a display panel including a plurality ofpixel PX, and signal lines including a gate line 121 transmitting a gatesignal and a data line 171 transmitting a data signal, a switchingtransistor Qs including a switching semiconductor layer 152 s and aswitching gate electrode 124 s, a switching source electrode 173 s, aswitching drain electrode 175 s, and a driving transistor Qd. In variousembodiments, the foregoing components may be positioned on a substrate110.

The structure of the driving transistor Qd may be the same as thestructure of the transistor TR of the above-described exemplaryembodiment(s). As such, a more detailed description is omitted asotherwise unnecessarily repetitive.

The gate line 121 may include a part mainly extending in the firstdirection D1, and the data line 171 may include a part mainly extendingin the second direction D2. The gate line 121 may be positioned at thesame layer as the upper electrode 124, and the data line 171 may bepositioned at the same layer as the lower conductor 172. The lowerconductor 172 according to various exemplary embodiments where it is asignal line transmitting a driving voltage may extend to be mainlyelongated in the second direction D2 like the data line 171.

In various exemplary embodiments, the switching semiconductor layer 152s includes a channel region 154 s in which the channel of the switchingtransistor Qs may be formed, and a switching source region 153 s and aswitching drain region 155 s respectively positioned at both sides ofthe channel region 154 s. The switching semiconductor layer 152 s, forexample, may include a metal oxide, polysilicon, or amorphous silicon,and may be positioned at the same layer as the semiconductor layer 152of the transistor Qd, but it is not limited to such configurations.

The carrier concentration of the switching source region 153 s and theswitching drain region 155 s may be larger than the carrierconcentration of the switching channel region 154 s, and the switchingsource region 153 s and the switching drain region 155 s are conductive.

In various exemplary embodiments, the switching gate electrode 124 soverlaps the channel region 154 s of the switching semiconductor layer152 s via an insulating layer (not shown). The switching gate electrode124 s may be connected with the gate line 121 as depicted, therebyreceiving the gate signal. The switching gate electrode 124 s may bepositioned at the same layer as the gate line 121.

The intermediate insulating layer 160 may further include a contact hole163 s positioned on the switching source region 153 s, a contact hole165 s positioned on the switching drain region 155 s, a contact hole 162s positioned on the data line 171, and a contact hole 166 s positionedon the upper electrode 124 as depicted.

The switching source electrode 173 s and the switching drain electrode175 s may be positioned at the same layer as the first connection part173 and the second connection part 175 as according to the various suchembodiments described above. The switching source electrode 173 s mayelectrically connect the data line 171 and the switching source region153 s of the switching transistor Qs to each other through the contactholes 162 s and 163 s, and the switching drain electrode 175 s mayelectrically connect the switching drain region 155 s of the switchingtransistor Qs and the upper electrode 124 of the driving transistor Qdthrough the contact holes 165 s and 166 s.

In various exemplary embodiments, the upper electrode 124 of the drivingtransistor Qd may be applied with the voltage transmitted from theswitching drain region 155 s of the switching transistor Qs. The firstconnection part 173 of the driving transistor Qd may be connected to thelower conductor 172 of the driving voltage to transmit the drivingvoltage to the driving transistor Qd.

Referring to FIG. 18 and FIG. 19, a passivation layer 180 including theinsulating material may be positioned on the first connection part 173,the second connection part 175, the switching source electrode 173 s,and the switching drain electrode 175 s as depicted. Accordingly, invarious exemplary embodiments, the passivation layer 180 includes acontact hole 185 exposing the second connection part 175. The uppersurface of the passivation layer 180 except for the contact hole 185 maybe substantially flat.

A pixel electrode 191 may be positioned on the passivation layer 180.The pixel electrode 191 may be connected to the second connection part175 and the drain region 155 of the driving transistor Qd through thecontact hole 185, thereby receiving the voltage.

A pixel definition layer 360 may be positioned on the pixel electrode191 and the passivation layer 180. The pixel definition layer 360includes an opening 365 positioned on the pixel electrode 191. In theopening 365 of the pixel definition layer 360, an emission layer 370 maybe positioned on the pixel electrode 191 and a common electrode 270 maybe positioned on the emission layer 370 as depicted. The commonelectrode 270 may be applied with a common voltage. The pixel electrode191, the emission layer 370, and the common electrode 270 together forman organic light emitting diode (OLED).

The structure of the layers positioned on the pixel electrode 191 is notlimited to the structure shown in the Figures. Rather, that structuremay be variously changed depending on a kind of the display device.

An equivalent circuit for one pixel PX of the transistor array panelaccording to the exemplary embodiment shown in FIG. 18 and FIG. 19 isshown in FIG. 20. Referring to FIG. 20, one pixel PX includes aswitching transistor Qs, a driving transistor Qd, a capacitor Cst, andan organic light emitting diode (OLED).

In the depicted embodiment, the switching transistor Qs includes acontrol terminal connected to the gate line 121, an input terminalconnected to the data line 171, and an output terminal connected to acontrol terminal of the driving transistor Qd. The switching transistorQs transmits the data signal transmitted from the data line 171 to thecontrol terminal of the driving transistor Qd in response to the gatesignal transmitted from the gate line 121.

The driving transistor Qd includes an input terminal connected to thelower conductor 172 transmitting the driving voltage and an outputterminal connected to the organic light emitting diode (OLED). Thedriving thin film transistor Qd outputs a current that has a varyingmagnitude depending on a voltage applied between the control terminaland the output terminal.

In the depicted embodiment, the capacitor Cst is connected between thecontrol terminal and the input terminal of the driving transistor Qd,charges the data signal applied to the control terminal of the drivingtransistor Qd, and maintains the data signal after the switchingtransistor Qs is turned off.

The organic light emitting diode (OLED) displays an image by changingintensity thereof depending on the output current of the drivingtransistor Qd.

The switching transistor Qs and the driving transistor Qd may be ann-type transistor, however at least one may be a p-type transistor. Thechannel type of the switching transistor Qs and the driving transistorQd may be the same or different.

Next, the detailed structure of the transistor array panel according toan exemplary embodiment will be described with reference to FIG. 21 andFIG. 22 along with the above-described FIG. 1 to FIG. 5.

FIG. 21 is a partial layout view of a transistor array panel accordingto another exemplary embodiment of the invention, and FIG. 22 is across-sectional view taken along a line B-BI of FIG. 21 showing oneexample of a portion of the transistor array panel of FIG. 21.

Referring to FIG. 21 and FIG. 22, the transistor array panel accordingto various exemplary embodiments is the display panel including theplurality of pixels PX. The gate line 121 transmitting the gate signaland the transistor Q may be positioned on the substrate 110 as depicted.

The structure of the transistor Q is the same as the structure ofexemplary embodiments of the transistor TR described above. Accordingly,a detailed description of the structure of the transistor Q is omittedas unnecessarily duplicative.

The gate line 121 may include the part mainly extending in the firstdirection D1 and may be connected to the upper electrode 124, and may bepositioned with the same layer as the upper electrode 124 as depicted.

The lower conductor 172 may include the part mainly extending in thesecond direction D2 and may cross the gate line 121. The lower conductor172 may be the data line transmitting the data voltage.

In various exemplary embodiments, the display panel is a panel of theliquid crystal display and has the same cross-section as most of theexemplary embodiments shown in the above-described FIG. 1 to FIG. 5, andthe passivation layer 180 including the insulating material may bepositioned on the first connection part 173 and the second connectionpart 175. As depicted, the passivation layer 180 includes a contact hole185 exposing the second connection part 175. The upper surface of thepassivation layer 180 except for the contact hole 185 may besubstantially flat.

The pixel electrode 191 may be positioned on the passivation layer 180as depicted. The pixel electrode 191 may be connected to the secondconnection part 175 and the drain region 155 of the transistor Q throughthe contact hole 185, thereby receiving the data voltage.

In various exemplary embodiments, a liquid crystal layer 3 including aplurality of liquid crystal molecules is positioned on the pixelelectrode 191, and an upper layer 200 facing the pixel electrode 191 maybe positioned on the liquid crystal layer 3. The upper layer 200 mayinclude a separate substrate or an insulating layer that is differentfrom the substrate 110. Also, the upper layer 200 may include a commonelectrode (not shown) generating an electric field to the liquid crystallayer 3 along with the pixel electrode 191. Alternatively, the commonelectrode may be positioned between the liquid crystal layer 3 and thetransistor Q.

In various embodiments that are different than the embodiments shown inFIG. 21 and FIG. 22, the lower electrode 70 may be omitted, and in somesuch embodiments, the contact holes 166 and 116 may be omitted and thesecond connection part 175 is not connected to the lower electrode 70.

Next, the manufacturing method of the transistor array panel accordingto another exemplary embodiment of the invention will be described withreference to FIG. 23 to FIG. 27 along with FIG. 1 to FIG. 17.

The manufacturing method of the transistor array panel according to theexemplary embodiment of FIG. 23 to FIG. 27 is the same as most of themanufacturing method according to the exemplary embodiments described inFIG. 6 to FIG. 17, however the manufacturing method according to theexemplary embodiment of FIG. 23 to FIG. 27 is different with respect tothe step of removing the intermediate insulating layer 160 by using themask pattern 52 as the mask.

Referring to FIG. 23, in the depicted embodiment, the intermediateinsulating layer 160 is removed by using the mask pattern 52 as the maskto form a hole 162 b positioned on the lower conductor 172, a hole 166 bpositioned on the lower electrode 70, a hole 163 b positioned on thesource region 153, and a hole 165 b positioned on the drain region 155.

The holes 162 b and 166 b extend to the inside of the buffer layer 111such that grooves 112 a and 116 a may be formed in the buffer layer 111corresponding to the holes 162 b and 166 b in the depicted embodiment.That is, the part of the upper portion of the buffer layer 111corresponding to the holes 162 b and 166 b may be removed as shown.Also, the holes 163 b and 165 b extend to the inside of thesemiconductor layer 152 such that grooves 113 a and 115 a may be formedin the semiconductor layer 152 corresponding to the holes 163 b and 165b. That is, the part of the upper portion of the semiconductor layer 152corresponding to the holes 163 b and 165 b may be removed as shown.

Next, referring to FIG. 24, in various exemplary embodiments, the maskpattern 52 is partially removed by the ashing to form the reduced maskpattern 52 a. Accordingly, the upper surface of the intermediateinsulating layer 160 positioned about the holes 162 b, 163 b, 165 b, and166 b of the intermediate insulating layer 160 may be exposed as shown.This exposed portion of the upper surface of the interlayer insulatinglater 160 that is exposed by ashing the mask pattern 52 is indicated,respectively, at 162 f, 163 f, 165 f and 166 f.

Next, referring to FIG. 25, the portion that is not covered by thereduced mask pattern 52 a to be exposed may be etched by using thereduced mask pattern 52 a as the mask. In various exemplary embodimentsof such a step, contact holes 162A, 163A, 165A, and 166A of theintermediate insulating layer 160, contact holes 112A and 116A of thebuffer layer 111, and contact holes 113A and 115A of the semiconductorlayer 152 are formed. These contact holes 112A, 116A, 113A, 115A, 162A,163A, 165A, and 166A are almost the same as the contact holes 112, 116,113, 115, 162, 163, 165, and 166 according to the exemplary embodimentsshown in FIG. 1 to FIG. 17, however the area and the size thereof may bedifferent. For example, in various exemplary embodiments, the contactholes 113A and 115A of the semiconductor layer 152 extend to the insideof the buffer layer 111 to be formed with the groove in the buffer layer111, and in some such embodiments, the depth of the groove of the bufferlayer 111 may be deeper than in the exemplary embodiment shown in FIG.15. That is, the depth of the contact holes 113A and 115A may be deeperthan those of the exemplary embodiments described above. As the term isused herein, the depth means the length of the direction toward thesubstrate 110 in the cross-sectional structure, that is, the length indirection D3. The term depth is used in the same manner hereafter.

The plan area of at least some of the contact holes 112A, 116A, 113A,115A, 162A, 163A, 165A, and 166A according to the present exemplaryembodiment may be wider than each plan area of the contact holes 112,116, 113, 115, 162, 163, 165, and 166, as, for example, is shown by theexemplary embodiment of FIG. 17.

In various exemplary embodiments, the contact holes 162A and 166A of theintermediate insulating layer 160 do not extend to the buffer layer 111,and are thus different than the embodiment shown, however, inembodiments where the contact holes 162A and 166A do not extend to thebuffer layer 111, the part of the upper portion of the buffer layer 111corresponding to the contact holes 162A and 166A of the intermediateinsulating layer 160 may be etched such that the contact holes 162A and166A of the intermediate insulating layer 160 may thereafter extend tothe inside of the buffer layer 111. Likewise, in some embodiments, thecontact holes 163A and 165A of the intermediate insulating layer 160 donot extend to the semiconductor layer 152, and are thus different thanthe embodiment shown, however, in these differing embodiments, the partof the upper portion of the semiconductor layer 152 corresponding to thecontact holes 163A and 165A of the intermediate insulating layer 160 maybe etched such that the contact holes 163A and 165A of the intermediateinsulating layer 160 may thereafter extend to the inside of thesemiconductor layer 152.

Next, referring to FIG. 26, the reduced mask pattern 52 a may be removedas shown.

Next, referring to FIG. 27, in various exemplary embodiments, theconductive layer is deposited on the intermediate insulating layer 160and patterned to form the upper conductive layer including the firstconnection part 173 and the second connection part 175.

Next, the manufacturing method of the transistor array panel accordingto an exemplary embodiment will be described with reference to FIG. 28and FIG. 29 along with FIG. 23 to FIG. 27.

The manufacturing method of the transistor array panel according to thefurther exemplary embodiment of FIG. 28 and FIG. 29 is almost the sameas the manufacturing method according to the exemplary embodiment shownin FIG. 23 to FIG. 27, however, with respect to the step of etching theportion that is not covered by the reduced mask pattern 52 a by usingthe reduced mask pattern 52 a as the etching mask, the exemplaryembodiment of FIG. 28 and FIG. 29 is different.

Referring to FIG. 28, in various exemplary embodiments, the portion thatis not covered by the reduced mask pattern 52 a is etched by using thereduced mask pattern 52 a as the mask. In this step, contact holes 162B,163B, 165B, and 166B of the intermediate insulating layer 160, contactholes 112B and 116B of the buffer layer 111, and contact holes 113B and115B of the semiconductor layer 152 are formed.

The contact holes 112B, 116B, 113B, 115B, 162B, 163B, 165B, and 166B arealmost the same as the contact holes 112A, 116A, 113A, 115A, 162A, 163A,165A, and 166A according to the exemplary embodiment shown in FIG. 25,however, in various exemplary embodiments the depth of the contact holes162B and 166B may be different. In the etching step as depicted, theintermediate insulating layer 160 that is not covered by the reducedmask pattern 52 a is removed, and at least part of the buffer layer 111positioned under the removed intermediate insulating layer 160 isremoved, as shown in FIG. 28, thereby the contact holes 162B and 166Bextending to the inside of the buffer layer 111 may be formed. In somesuch embodiments, the cross-sectional thickness of the buffer layer 111overlapping the contact holes 162B and 166B may be smaller than thecross-sectional thickness of the buffer layer 111 that is not overlappedwith the contact holes 162B and 166B, for example, the buffer layer 111overlapping the channel region 154.

In various exemplary embodiments, while the contact holes 162B and 166Bare formed, the semiconductor layer 152 positioned under the removedintermediate insulating layer 160 is not substantially etched.Accordingly, in some such embodiments, the contact holes 163B and 165Bare mainly formed in the intermediate insulating layer 160. Thus, invarious exemplary embodiments, the contact holes 163B and 165B do notextend to the inside of the semiconductor layer 152. In some suchembodiments, the etching gas used in the described etching step may havea very high etch rate for the buffer layer 111 and for the semiconductorlayer 152.

The contact holes 113B and 115B of the semiconductor layer 152 may thus,in various exemplary embodiments, be extended to the buffer layer 111 asrepresented by a solid line, or may alternatively only be formed in thesemiconductor layer 152 as represented by a dotted line. That is, invarious exemplary embodiments, the semiconductor layer 152 is notremoved, that is, fully etched away, such that the semiconductor layer152 remains at the bottom of contact holes 113B and 115B.

Next, referring to FIG. 29, after removing the reduced mask pattern 52a, in various exemplary embodiments the conductive layer is deposited onthe intermediate insulating layer 160 and may be patterned to form theupper conductive layer including the first connection part 173 and thesecond connection part 175.

Next, the manufacturing method of the transistor array panel accordingto another exemplary embodiment of the invention will be described withreference to FIG. 30 to FIG. 32 along with FIG. 6 to FIG. 17.

The manufacturing method of the transistor array panel according to theexemplary embodiment of FIG. 30 to FIG. 32 is the same as most of themanufacturing method according to the exemplary embodiment described inFIG. 6 to FIG. 17, however with respect to the step of etching theportion that is not covered by the reduced mask pattern 52 a and isexposed by using the reduced mask pattern 52 a as the etching mask, theexemplary embodiment of FIG. 30 to FIG. 32 is different.

In the further exemplary embodiment of FIG. 30 to FIG. 32, the portionthat is not covered by the reduced mask pattern 52 a and is exposed isetched by using the reduced mask pattern 52 a as the etching mask toform contact holes 162C, 163C, 165C, and 166C and contact holes 113C and115C. In some such embodiments, the buffer layer 111 and thesemiconductor layer 152 corresponding to the contact holes 162C, 163C,165C, and 166C of the intermediate insulating layer 160 may be removed.

The contact holes 162C and 166C may extend to the upper surface of thelower conductor 172 and the lower electrode 70. The contact holes 162Cand 166C may be formed in the intermediate insulating layer 160 and thebuffer layer 111, and the side surface thereof may be substantiallyflat.

The contact holes 163C and 165C may extend to the inside of thesemiconductor layer 152 or the inside of the buffer layer 111. As shownin FIG. 30, the semiconductor layer 152 corresponding to the contactholes 163C and 165C of the intermediate insulating layer 160 may beremoved such that only the side surface may be exposed instead of theupper surface of the semiconductor layer 152. In various exemplaryembodiments, the contact holes 163C and 165C are formed in theintermediate insulating layer 160 and the semiconductor layer 152, andthe side surface may be substantially flat. In some such embodiments,the contact holes 113C and 115C are not formed in the semiconductorlayer 152 but may be formed in the buffer layer 111, and may form theside surface of the step shape along with the contact holes 163C and165C of the intermediate insulating layer 160.

In various exemplary embodiments that are different than the embodimentdepicted in FIG. 30, the contact holes 113C and 115C may be omitted. Insome such embodiments, in the contact holes 163C and 165C of theintermediate insulating layer 160, the upper surface of the buffer layer111 may be substantially flat.

Next, referring to FIG. 31A, in various exemplary embodiments, thereduced mask pattern 52 a is removed, and as shown in FIG. 32, theconductive layer is deposited on the intermediate insulating layer 160and is patterned to form the upper conductive layer including the firstconnection part 173 and the second connection part 175 as depicted. FIG.31B shows enlarged detail of an exemplary contact hole from FIG. 31A,including a first side surface 3110, a second side surface 3120, and abottom. In this embodiment, the bottom has two discrete sections 3130and 3140 disposed at different levels in the contact hole. Section 3130may be formed as a generally flat annular surface and section 3140 is adepression or inset extending beneath section 3130. A shoulder S isformed by a generally horizontally planar surface extending between thesecond side surface 3120 and the top of the inset formed by bottomsection 3140. Thus, in this embodiment, the entirety of the shoulder Sis formed in the bottom of the contact hole.

The first side surface 3110 and the second side surface 3120 both have asubstantially constant slope. Further the slope of first side surface3110 is essentially the same as the slope of the second side surface3120. Still further, the first side surface 3110 is connected to thesecond side surface 3120 such that a substantially straight line isformed by the first side surface 3110 and the second side surface 3120unaffected by a transition between layers defining the first sidesurface 3110 and the second side surface 3120. Thus, while the sidewalls of the this exemplary embodiment of a contact hole are generallycontiguous, the bottom of this exemplary contact hole has a steppedshape.

FIG. 31C shows enlarged detail of another exemplary contact hole fromFIG. 31A, including a first side surface 3150, a second side surface3160, and a bottom 3170. As with the embodiment of the contact holedepicted in FIG. 31B, in the embodiment, the first side surface 3150 andthe second side surface 3160 both have a substantially constant slope.Further the slope of first side surface 3150 is essentially the same asthe slope of the second side surface 3160. Still further, the first sidesurface 3150 is connected to the second side surface 3160 such that asubstantially straight, contiguous line is formed by the first sidesurface 3150 and the second side surface 3160 without a noticeabletransition between layers defining the first side surface 3150 and thesecond side surface 3160. Thus, in the exemplary embodiment of a contacthole depicted in FIG. 31C, there is no shoulder joining discrete widthsof the hole, and, the bottom 3170 is contiguous with the upper surfaceof the layer at the bottom 3170 of the exemplary contact hole.

Next, the manufacturing method of the transistor array panel accordingto an exemplary embodiment will be described with reference to FIG. 33Aand FIG. 34 along with FIG. 6 to FIG. 17.

The manufacturing method of the transistor array panel according to thestill further exemplary embodiment of FIG. 33A and FIG. 34 is the sameas most of the manufacturing method according to the exemplaryembodiment described in FIG. 6 to FIG. 17, however, with respect to theashing step of the mask pattern 52, in the exemplary embodiment of FIG.33A and FIG. 34, that step may be omitted.

FIG. 33B shows enlarged detail of an exemplary contact hole from FIG.33A, including a first side surface 3310, a second side surface 3320 anda bottom 3130. In this embodiment, a junction J exists between the firstside surface 3310 and the second side surface 3320. As with some thepreviously described embodiments of contact holes, in the contact holedepicted in FIG. 33B, the first side surface 3310 and the second sidesurface 3320 both have a substantially constant slope. However, theslope of first side surface 3310 is noticeably different than the slopeof the second side surface 3320. Still further, the first side surface3110 is connected to the second side surface 3120 such that the junctionJ denotes a transition between layers defining the first side surface3310 and the second side surface 3320 such that a slope of the firstside surface 3310 above junction J is different than a slope of thesecond side surface 3320 below junction J. Also, in this embodiment, thebottom 3330 extends into a bottom layer below the second side surface3320.

According to various exemplary embodiments, as shown in FIG. 13, afterthe first etching for removing the intermediate insulating layer 160 byusing the mask pattern 52 as the mask to form the hole 162 a positionedon the lower conductor 172, the hole 166 a positioned on the lowerelectrode 70, the hole 163 a positioned on the source region 153, andthe hole 165 a positioned on the drain region 155, the intermediateinsulating layer 160 and the buffer layer 111 that are not covered bythe mask pattern 52 are etched along with the mask pattern 52. In somesuch embodiments, an etching gas of a different composition than theetching gas used in the first etching may be used. For example, anetching gas in which an oxygen-based gas and a fluorine-based gas aremixed may be used, and a ratio of the oxygen-based gas and thefluorine-based gas may be appropriately controlled to control theetching degree of the mask pattern 52. Accordingly, in various exemplaryembodiments, an amount of the oxygen-based gas is controlled to behigher than an amount of the fluorine-based gas in the first etching torapidly remove the mask pattern 52 rather than the intermediateinsulating layer 160 and the buffer layer 111 such that the etch rate ofthe etching gas for the mask pattern 52 may be higher than the etch ratefor the intermediate insulating layer 160 and the buffer layer 111.Also, in various exemplary embodiments, the etch rate of the etching gasfor the intermediate insulating layer 160 and the buffer layer 111 maybe higher than the etch rate for the semiconductor layer 152.

Accordingly, in various exemplary embodiments, as the mask pattern 52 isetched to be a reduced mask pattern 52 b, the intermediate insulatinglayer 160 and the buffer layer 111 that are gradually exposed thereunderare gradually etched, and thereby, as shown in FIG. 33A, contact holes162D, 166D, 112D, and 116D having the side surfaces with a smoothinclination for the upper surface of the substrate 110 may be formed inthe intermediate insulating layer 160 and the buffer layer 111.

The inclination of the side surface of the contact holes 162D and 166Dand the inclination of the side surface of the contact hole 112D and116D may be similar. Accordingly, the contact hole 162D and the contacthole 112D may together substantially form one flat side surface and thecontact hole 166D and the contact hole 116D may together substantiallyform one flat side surface, but the geometry in this location of thestructure is not limited to one substantially flat side surface. Forexample, as described in detail elsewhere herein, some embodiments havea stepped geometry.

In various exemplary embodiments, as the mask pattern 52 is etched to bethe reduced mask pattern 52 b, the intermediate insulating layer 160 andthe semiconductor layer 152 that are gradually exposed are alsogradually etched, and thereby, as shown in FIG. 33A, the contact holes163D, 165D, 113D, and 115D having the side surface forming the smoothinclination for the surface of the substrate 110 are formed in theintermediate insulating layer 160 and the semiconductor layer 152. Theslope of the side surface of the contact holes 163D and 165D for theupper surface of the substrate 110 and the slope of the side surface ofthe contact holes 113D and 115D for the upper surface of the substrate110 may depend on the selectivity of the etching gas and may bedifferent from each other. Particularly, as shown in FIG. 33A, the slopeof the side surface of the contact holes 113D and 115D formed in thesemiconductor layer 152 may be smoother than the slope of the sidesurface of the contact holes 163D and 165D. The inner angle B of theside surface of the contact holes 113D and 115D of the semiconductorlayer 152 for the upper surface of the substrate 110 may be about 10°and may be smaller than the inner angle A of the side surface of thecontact holes 113 and 115 of the semiconductor layer 152 for the surfaceof the substrate 110. In other embodiments the slope angles havedifferent values; and, in other embodiments the geometries also vary.

Alternatively, the manufacturing method of the transistor array panelaccording to these exemplary embodiments of the invention may bedifferent from the manufacturing method according to the exemplaryembodiment shown in FIG. 6 to FIG. 17. As described above in FIG. 12,after forming the mask pattern 52 on the intermediate insulating layer160, not only is the intermediate insulating layer 160 etched, but theintermediate insulating layer 160 and the buffer layer 111 that are notcovered by the mask pattern 52 are etched together along with the maskpattern 52. In some such embodiments, the dry etching method may beused. For example, the etching gas in which the oxygen-based gas and thefluorine-based gas are mixed may be used, and a ratio of theoxygen-based gas and the fluorine-based gas may be appropriatelycontrolled to control the etching degree of the mask pattern 52. In theexemplary embodiments, the amount of the oxygen-based gas is controlledto be higher than the amount of the fluorine-based gas to rapidly removethe mask pattern 52 rather than the intermediate insulating layer 160and the buffer layer 111 such that the etch rate of the etching gas forthe mask pattern 52 may be controlled to be higher than the etch ratefor the intermediate insulating layer 160 and the buffer layer 111.

Accordingly, as above-described, in various exemplary embodiments, asthe mask pattern 52 is etched to be the reduced mask pattern 52 b, theintermediate insulating layer 160 and the buffer layer 111 that aregradually exposed thereunder are gradually etched, and thereby, as shownin FIG. 33A, the contact holes 162D, 166D, 112D, and 116D having thesmooth inclination for the surface of the substrate 110 are formed inthe intermediate insulating layer 160 and the buffer layer 111, and thecontact holes 163D, 165D, 113D, and 115D having the side surface withthe smooth inclination for the surface of the substrate 110 are formedin the intermediate insulating layer 160 and the semiconductor layer152.

Next, referring to FIG. 34, in various exemplary embodiments, afterremoving the reduced mask pattern 52 b, the conductive layer isdeposited on the intermediate insulating layer 160 and is patterned toform the upper conductive layer including the first connection part 173and the second connection part 175.

According to various exemplary embodiments, although the exposed uppersurface of the source region 153 and the drain region 155 of thesemiconductor layer 152 corresponding to the contact holes 163D and 165Ddoes not substantially exist, the inclination of the side surface of thesemiconductor layer 152 is smooth for the surface of the substrate 110in the contact holes 113D and 115D such that the contact area of thefirst connection part 173 and the second connection part 175 and thesource region 153 and the drain region 155 of the semiconductor layer152 may be widened, thereby reducing the contact resistance.

Next, the transistor array panel constructed according to yet anotherexemplary embodiment of the invention will be described with referenceto FIG. 35 along with the above-described drawings.

Referring to FIG. 35, in various exemplary embodiments, the transistorarray panel according to the present exemplary embodiment is almost thesame as the transistor array panel according to the severalabove-described exemplary embodiments, however the structure of theintermediate insulating layer 160 may be different. Accordingly, theintermediate insulating layer 160 may include the multilayer including afirst layer 160 a and a second layer 160 b.

An organic layer 230 including the organic material may be furtherpositioned between the first layer 160 a and the second layer 160 b ofthe intermediate insulating layer 160. The organic layer 230 may be acolor filter, for example.

In various exemplary embodiments, the first layer 160 a and the secondlayer 160 b included in the intermediate insulating layer 160 includethe contact holes 162, 163, 165, 166, 162A, 163A, 165A, 166A, 162B,163B, 165B, 166B, 162C, 163C, 165C, 166C, 162D, 163D, 165D, and 166D. Insome such embodiments, the other structures are the same as in theembodiments described above. Accordingly, for the sake of brevity, adetailed description thereof will be omitted.

Although certain exemplary embodiments and implementations have beendescribed herein, other embodiments and modifications will be apparentfrom this description. Accordingly, the inventive concept is not limitedto such embodiments, but rather to the broader scope of the appendedclaims and various obvious modifications and equivalent arrangements.

What is claimed is:
 1. A transistor array panel comprising: a substrate;a buffer layer disposed on the substrate; a semiconductor layer disposedon the buffer layer; an intermediate insulating layer disposed on thesemiconductor layer; a lower conductive layer disposed between thesubstrate and the buffer layer; and an upper conductive layer disposedon the intermediate insulating layer, wherein: the semiconductor layercomprises a first contact hole, the intermediate insulating layercomprises a second contact hole positioned in an overlappingrelationship with the first contact hole, the upper conductive layer isin contact with a side surface of the semiconductor layer in the firstcontact hole, the buffer layer comprises a third contact hole positionedover and exposing the lower conductive layer, the intermediateinsulating layer comprises a fourth contact hole positioned in anoverlapping relationship with the third contact hole, the lowerconductive layer comprises a different material from a material of thesemiconductor layer, and the fourth contact hole extends into the bufferlayer.
 2. The transistor array panel of claim 1, wherein each of thefirst, second, third and fourth contact holes has a side surfacedefining a width of its respective hole, with at least one of the sidesurfaces having a substantially constant slope.
 3. The transistor arraypanel of claim 1, wherein the upper conductive layer is in contact witha pixel electrode layer.
 4. A transistor array panel comprising: asubstrate; a buffer layer disposed on the substrate; a semiconductorlayer disposed on the buffer layer; an intermediate insulating layerdisposed on the semiconductor layer; and an upper conductive layerdisposed on the intermediate insulating layer, wherein: thesemiconductor layer comprises a first contact hole, the intermediateinsulating layer comprises a second contact hole positioned in anoverlapping relationship with the first contact hole, the upperconductive layer is in contact with a side surface of the semiconductorlayer in the first contact hole, and a slope of a side surface of thefirst contact hole is different than a slope of a side surface of thesecond contact hole.
 5. A method of manufacturing a transistor arraypanel, the method comprising: forming a buffer layer on a substrate;forming a semiconductor layer on the buffer layer; forming anintermediate insulating layer on the semiconductor layer; forming afirst mask pattern on the intermediate insulating layer; forming a firstetching hole in the intermediate insulating layer by using the firstmask pattern as an etching mask; removing a part of the first maskpattern to form a second mask pattern exposing an upper surface of theintermediate insulating layer around the first etching hole of theintermediate insulating layer; and removing the intermediate insulatinglayer and the semiconductor layer by using the second mask pattern as anetching mask to form a first contact hole in the semiconductor layer anda second contact hole in the intermediate insulating layer, wherein thestep of forming the first contact hole comprises removing at least partof the buffer layer.
 6. A method of manufacturing a transistor arraypanel, the method comprising: forming a buffer layer on a substrate;forming a semiconductor layer on the buffer layer; forming anintermediate insulating layer on the semiconductor layer; forming afirst mask pattern on the intermediate insulating layer; forming a firstetching hole in the intermediate insulating layer by using the firstmask pattern as an etching mask; removing a part of the first maskpattern to form a second mask pattern exposing an upper surface of theintermediate insulating layer around the first etching hole of theintermediate insulating layer; and removing the intermediate insulatinglayer and the semiconductor layer by using the second mask pattern as anetching mask to form a first contact hole in the semiconductor layer anda second contact hole in the intermediate insulating layer, wherein onlyone mask is used in the forming of the first contact hole and the secondcontact hole.
 7. A method for manufacturing a transistor array panel,comprising: forming a buffer layer on a substrate; forming asemiconductor layer on the buffer layer; forming an intermediateinsulating layer on the semiconductor layer; forming a first maskpattern on the intermediate insulating layer; and etching the first maskpattern, the intermediate insulating layer, the buffer layer, and thesemiconductor layer that are not covered by the first mask patterntogether to expose a side surface of the intermediate insulating layer,the buffer layer, and the semiconductor layer, wherein in the etchingstep, an etching gas is used, wherein an etch rate of the etching gasfor the first mask pattern is higher than an etch rate for theintermediate insulating layer.
 8. The method of claim 7, furthercomprising after forming the first mask pattern, forming a first hole inthe intermediate insulating layer by using the first mask pattern as anetching mask.
 9. A display panel, comprising: a transistor array, thetransistor array comprising a substrate, a semiconductor layer disposedon the substrate, an intermediate insulating layer disposed on thesemiconductor layer, an upper conductive layer disposed on theintermediate insulating layer, wherein: the semiconductor layer andintermediate insulating layer defines a first contact hole comprising astepped, cross sectional shape, the upper conductive layer is in contactwith a side surface of the intermediate insulating layer at an upperportion of the first contact hole, the upper conductive layer is incontact with a side surface of the semiconductor layer at a lowerportion of the first contact hole, and the stepped shape of the firstcontact hole is defined by a bottom surface of an upper portion of thefirst contact hole, a bottom surface of a the lower portion of the firstcontact hole, and a side wall connecting the bottom surfaces; and abuffer layer, wherein: the upper conductive layer is in contact with thebuffer layer at a bottom portion of the first contact hole, thesemiconductor layer and intermediate insulating layer further define asecond contact hole having a stepped shape, the buffer layer and theintermediate insulating layer define a third contact hole having astepped shape, and the buffer layer and the intermediate insulatinglayer further define a fourth contact hole having a stepped shape.
 10. Atransistor array panel, comprising: a first insulating layer defining afirst portion of a contact hole extending entirely through the firstinsulating layer; a semiconductor layer positioned adjacent the firstinsulating layer at a location of the contact hole and defining a secondportion of the contact hole extending entirely through the semiconductorlayer; and a second insulating layer positioned adjacent thesemiconductor layer at the location of the contact hole and defining athird portion of the contact hole that extends only partially into thesecond insulating layer, wherein the contact hole comprises a transitionselected from the group consisting of: two different levels within thethird portion of the contact hole, the two different levels within thethird portion of the contact hole being connected by a shoulder withinthe third portion of the contact hole; and a junction between the firstand second portions of the contact hole defining a transition between afirst slope of a sidewall of the first portion and a second slope of asidewall of the second portion, the first slope and the second slopebeing different.